5/13/2011	12:05:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/13/2011	12:05:09 PM	Recipe started at 12:05 PM
5/13/2011	12:05:09 PM	H2 valve closed
5/13/2011	12:05:09 PM	BCl3 valve closed
5/13/2011	12:05:09 PM	PH3 valve closed
5/13/2011	12:05:09 PM	SiCl4 pre valve closed
5/13/2011	12:05:09 PM	SiCl4 post valve closed
5/13/2011	12:05:09 PM	Main Vac valve closed
5/13/2011	12:05:09 PM	Bypass valve closed
5/13/2011	12:05:09 PM	Bubbler valve closed
5/13/2011	12:05:09 PM	Helium valve opened
5/13/2011	12:05:09 PM	Helium MFC set to  500.000000
5/13/2011	12:05:09 PM	H2 MFC set to  0.000000
5/13/2011	12:05:09 PM	BCl3 MFC set to  0.000000
5/13/2011	12:05:09 PM	PHl3 MFC set to  0.000000
5/13/2011	12:05:09 PM	SiCl4 MFC set to  0.000000
5/13/2011	12:05:09 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	12:05:09 PM	Tube furnace set to 0
5/13/2011	12:05:18 PM	Helium valve closed
5/13/2011	12:05:18 PM	H2 valve closed
5/13/2011	12:05:18 PM	BCl3 valve closed
5/13/2011	12:05:18 PM	PH3 valve closed
5/13/2011	12:05:18 PM	SiCl4 pre valve closed
5/13/2011	12:05:18 PM	SiCl4 post valve closed
5/13/2011	12:05:18 PM	Main Vac valve closed
5/13/2011	12:05:18 PM	Bypass valve closed
5/13/2011	12:05:18 PM	Bubbler valve closed
5/13/2011	12:05:18 PM	Helium MFC set to  0.000000
5/13/2011	12:05:18 PM	H2 MFC set to  0.000000
5/13/2011	12:05:18 PM	BCl3 MFC set to  0.000000
5/13/2011	12:05:18 PM	PHl3 MFC set to  0.000000
5/13/2011	12:05:18 PM	SiCl4 MFC set to  0.000000
5/13/2011	12:05:18 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	12:05:18 PM	Tube furnace set to 0
5/13/2011	12:05:19 PM	Run finished at 12:05 PM
5/13/2011	12:05:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/13/2011	12:05:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/13/2011	12:05:20 PM	Recipe started at 12:05 PM
5/13/2011	12:05:20 PM	Helium valve closed
5/13/2011	12:05:20 PM	H2 valve closed
5/13/2011	12:05:20 PM	BCl3 valve closed
5/13/2011	12:05:20 PM	PH3 valve closed
5/13/2011	12:05:20 PM	SiCl4 pre valve closed
5/13/2011	12:05:20 PM	SiCl4 post valve closed
5/13/2011	12:05:20 PM	Main Vac valve closed
5/13/2011	12:05:20 PM	Bubbler valve closed
5/13/2011	12:05:20 PM	Bypass valve opened
5/13/2011	12:05:20 PM	Helium MFC set to  0.000000
5/13/2011	12:05:20 PM	H2 MFC set to  0.000000
5/13/2011	12:05:20 PM	BCl3 MFC set to  0.000000
5/13/2011	12:05:20 PM	PHl3 MFC set to  0.000000
5/13/2011	12:05:20 PM	SiCl4 MFC set to  0.000000
5/13/2011	12:05:20 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	12:05:20 PM	Tube furnace set to 0
5/13/2011	12:05:27 PM	Helium valve closed
5/13/2011	12:05:27 PM	H2 valve closed
5/13/2011	12:05:27 PM	BCl3 valve closed
5/13/2011	12:05:27 PM	PH3 valve closed
5/13/2011	12:05:27 PM	SiCl4 pre valve closed
5/13/2011	12:05:27 PM	SiCl4 post valve closed
5/13/2011	12:05:27 PM	Bubbler valve closed
5/13/2011	12:05:27 PM	Main Vac valve opened
5/13/2011	12:05:27 PM	Bypass valve opened
5/13/2011	12:05:27 PM	Helium MFC set to  0.000000
5/13/2011	12:05:27 PM	H2 MFC set to  0.000000
5/13/2011	12:05:27 PM	BCl3 MFC set to  0.000000
5/13/2011	12:05:27 PM	PHl3 MFC set to  0.000000
5/13/2011	12:05:27 PM	SiCl4 MFC set to  0.000000
5/13/2011	12:05:27 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	12:05:27 PM	Tube furnace set to 0
5/13/2011	12:05:28 PM	Run finished at 12:05 PM
5/13/2011	12:05:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/13/2011	12:07:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/13/2011	12:07:16 PM	Recipe started at 12:07 PM
5/13/2011	12:07:16 PM	Helium valve closed
5/13/2011	12:07:16 PM	H2 valve closed
5/13/2011	12:07:16 PM	BCl3 valve closed
5/13/2011	12:07:16 PM	PH3 valve closed
5/13/2011	12:07:16 PM	SiCl4 pre valve closed
5/13/2011	12:07:16 PM	SiCl4 post valve closed
5/13/2011	12:07:16 PM	Main Vac valve closed
5/13/2011	12:07:16 PM	Bubbler valve closed
5/13/2011	12:07:16 PM	Bypass valve opened
5/13/2011	12:07:16 PM	Helium MFC set to  0.000000
5/13/2011	12:07:16 PM	H2 MFC set to  0.000000
5/13/2011	12:07:16 PM	BCl3 MFC set to  0.000000
5/13/2011	12:07:16 PM	PHl3 MFC set to  0.000000
5/13/2011	12:07:16 PM	SiCl4 MFC set to  0.000000
5/13/2011	12:07:16 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	12:07:16 PM	Tube furnace set to 0
5/13/2011	12:07:17 PM	Helium valve closed
5/13/2011	12:07:17 PM	H2 valve closed
5/13/2011	12:07:17 PM	BCl3 valve closed
5/13/2011	12:07:17 PM	PH3 valve closed
5/13/2011	12:07:17 PM	SiCl4 pre valve closed
5/13/2011	12:07:17 PM	SiCl4 post valve closed
5/13/2011	12:07:17 PM	Bubbler valve closed
5/13/2011	12:07:17 PM	Main Vac valve opened
5/13/2011	12:07:17 PM	Bypass valve opened
5/13/2011	12:07:17 PM	Helium MFC set to  0.000000
5/13/2011	12:07:17 PM	H2 MFC set to  0.000000
5/13/2011	12:07:17 PM	BCl3 MFC set to  0.000000
5/13/2011	12:07:17 PM	PHl3 MFC set to  0.000000
5/13/2011	12:07:17 PM	SiCl4 MFC set to  0.000000
5/13/2011	12:07:17 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	12:07:17 PM	Tube furnace set to 0
5/13/2011	12:07:22 PM	H2 valve closed
5/13/2011	12:07:22 PM	BCl3 valve closed
5/13/2011	12:07:22 PM	PH3 valve closed
5/13/2011	12:07:22 PM	SiCl4 pre valve closed
5/13/2011	12:07:22 PM	SiCl4 post valve closed
5/13/2011	12:07:22 PM	Bubbler valve closed
5/13/2011	12:07:22 PM	Helium valve opened
5/13/2011	12:07:22 PM	Main Vac valve opened
5/13/2011	12:07:22 PM	Bypass valve opened
5/13/2011	12:07:22 PM	Helium MFC set to  100.000000
5/13/2011	12:07:22 PM	H2 MFC set to  0.000000
5/13/2011	12:07:22 PM	BCl3 MFC set to  0.000000
5/13/2011	12:07:22 PM	PHl3 MFC set to  0.000000
5/13/2011	12:07:22 PM	SiCl4 MFC set to  0.000000
5/13/2011	12:07:22 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	12:07:23 PM	Tube furnace set to 0
5/13/2011	12:07:52 PM	Helium valve closed
5/13/2011	12:07:52 PM	H2 valve closed
5/13/2011	12:07:52 PM	BCl3 valve closed
5/13/2011	12:07:52 PM	PH3 valve closed
5/13/2011	12:07:52 PM	SiCl4 pre valve closed
5/13/2011	12:07:52 PM	SiCl4 post valve closed
5/13/2011	12:07:52 PM	Bubbler valve closed
5/13/2011	12:07:52 PM	Main Vac valve opened
5/13/2011	12:07:52 PM	Bypass valve opened
5/13/2011	12:07:52 PM	Helium MFC set to  0.000000
5/13/2011	12:07:52 PM	H2 MFC set to  0.000000
5/13/2011	12:07:52 PM	BCl3 MFC set to  0.000000
5/13/2011	12:07:52 PM	PHl3 MFC set to  0.000000
5/13/2011	12:07:52 PM	SiCl4 MFC set to  0.000000
5/13/2011	12:07:52 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	12:07:52 PM	Tube furnace set to 0
5/13/2011	12:08:52 PM	H2 valve closed
5/13/2011	12:08:52 PM	BCl3 valve closed
5/13/2011	12:08:52 PM	PH3 valve closed
5/13/2011	12:08:52 PM	SiCl4 pre valve closed
5/13/2011	12:08:52 PM	SiCl4 post valve closed
5/13/2011	12:08:52 PM	Bubbler valve closed
5/13/2011	12:08:52 PM	Helium valve opened
5/13/2011	12:08:52 PM	Main Vac valve opened
5/13/2011	12:08:52 PM	Bypass valve opened
5/13/2011	12:08:52 PM	Helium MFC set to  100.000000
5/13/2011	12:08:52 PM	H2 MFC set to  0.000000
5/13/2011	12:08:52 PM	BCl3 MFC set to  0.000000
5/13/2011	12:08:52 PM	PHl3 MFC set to  0.000000
5/13/2011	12:08:52 PM	SiCl4 MFC set to  0.000000
5/13/2011	12:08:52 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	12:08:52 PM	Tube furnace set to 0
5/13/2011	12:08:53 PM	Run aborted at 12:08 PM
5/13/2011	12:08:53 PM	Helium valve closed
5/13/2011	12:08:53 PM	H2 valve closed
5/13/2011	12:08:53 PM	BCl3 valve closed
5/13/2011	12:08:53 PM	PH3 valve closed
5/13/2011	12:08:53 PM	SiCl4 pre valve closed
5/13/2011	12:08:53 PM	SiCl4 post valve closed
5/13/2011	12:08:53 PM	Bypass valve closed
5/13/2011	12:08:53 PM	Main Vac valve closed
5/13/2011	12:08:53 PM	Bubbler valve closed
5/13/2011	12:08:53 PM	Helium MFC set to  0.000000
5/13/2011	12:08:53 PM	H2 MFC set to  0.000000
5/13/2011	12:08:53 PM	BCl3 MFC set to  0.000000
5/13/2011	12:08:53 PM	PHl3 MFC set to  0.000000
5/13/2011	12:08:53 PM	SiCl4 MFC set to  0.000000
5/13/2011	12:08:53 PM	Tube furnace set to 0
5/13/2011	12:08:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/13/2011	12:08:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/13/2011	12:08:55 PM	Recipe started at 12:08 PM
5/13/2011	12:08:55 PM	Helium valve closed
5/13/2011	12:08:55 PM	H2 valve closed
5/13/2011	12:08:55 PM	BCl3 valve closed
5/13/2011	12:08:55 PM	PH3 valve closed
5/13/2011	12:08:55 PM	SiCl4 pre valve closed
5/13/2011	12:08:55 PM	SiCl4 post valve closed
5/13/2011	12:08:55 PM	Main Vac valve closed
5/13/2011	12:08:55 PM	Bubbler valve closed
5/13/2011	12:08:55 PM	Bypass valve opened
5/13/2011	12:08:55 PM	Helium MFC set to  0.000000
5/13/2011	12:08:55 PM	H2 MFC set to  0.000000
5/13/2011	12:08:55 PM	BCl3 MFC set to  0.000000
5/13/2011	12:08:55 PM	PHl3 MFC set to  0.000000
5/13/2011	12:08:55 PM	SiCl4 MFC set to  0.000000
5/13/2011	12:08:55 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	12:08:55 PM	Tube furnace set to 0
5/13/2011	12:08:55 PM	Helium valve closed
5/13/2011	12:08:55 PM	H2 valve closed
5/13/2011	12:08:55 PM	BCl3 valve closed
5/13/2011	12:08:55 PM	PH3 valve closed
5/13/2011	12:08:55 PM	SiCl4 pre valve closed
5/13/2011	12:08:55 PM	SiCl4 post valve closed
5/13/2011	12:08:55 PM	Bubbler valve closed
5/13/2011	12:08:55 PM	Main Vac valve opened
5/13/2011	12:08:55 PM	Bypass valve opened
5/13/2011	12:08:55 PM	Helium MFC set to  0.000000
5/13/2011	12:08:55 PM	H2 MFC set to  0.000000
5/13/2011	12:08:55 PM	BCl3 MFC set to  0.000000
5/13/2011	12:08:55 PM	PHl3 MFC set to  0.000000
5/13/2011	12:08:55 PM	SiCl4 MFC set to  0.000000
5/13/2011	12:08:55 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	12:08:56 PM	Tube furnace set to 0
5/13/2011	12:08:56 PM	Run finished at 12:08 PM
5/13/2011	12:08:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/13/2011	12:10:34 PM	Recipe started at 12:10 PM
5/13/2011	12:10:34 PM	Helium valve closed
5/13/2011	12:10:34 PM	BCl3 valve closed
5/13/2011	12:10:34 PM	PH3 valve closed
5/13/2011	12:10:34 PM	SiCl4 pre valve closed
5/13/2011	12:10:34 PM	SiCl4 post valve closed
5/13/2011	12:10:34 PM	Main Vac valve closed
5/13/2011	12:10:34 PM	Bypass valve closed
5/13/2011	12:10:34 PM	Bubbler valve closed
5/13/2011	12:10:34 PM	H2 valve opened
5/13/2011	12:10:34 PM	Helium MFC set to  0.000000
5/13/2011	12:10:34 PM	H2 MFC set to  500.000000
5/13/2011	12:10:34 PM	BCl3 MFC set to  0.000000
5/13/2011	12:10:34 PM	PHl3 MFC set to  0.000000
5/13/2011	12:10:34 PM	SiCl4 MFC set to  0.000000
5/13/2011	12:10:34 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	12:10:34 PM	Tube furnace set to 0
5/13/2011	12:11:56 PM	Helium valve closed
5/13/2011	12:11:56 PM	BCl3 valve closed
5/13/2011	12:11:56 PM	PH3 valve closed
5/13/2011	12:11:56 PM	SiCl4 pre valve closed
5/13/2011	12:11:56 PM	SiCl4 post valve closed
5/13/2011	12:11:56 PM	Main Vac valve closed
5/13/2011	12:11:56 PM	Bypass valve closed
5/13/2011	12:11:56 PM	H2 valve opened
5/13/2011	12:11:56 PM	Bubbler valve opened
5/13/2011	12:11:56 PM	Helium MFC set to  0.000000
5/13/2011	12:11:56 PM	H2 MFC set to  500.000000
5/13/2011	12:11:56 PM	BCl3 MFC set to  0.000000
5/13/2011	12:11:56 PM	PHl3 MFC set to  0.000000
5/13/2011	12:11:56 PM	SiCl4 MFC set to  0.000000
5/13/2011	12:11:56 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	12:11:57 PM	Tube furnace set to 1000
5/13/2011	12:31:57 PM	Helium valve closed
5/13/2011	12:31:57 PM	PH3 valve closed
5/13/2011	12:31:57 PM	Main Vac valve closed
5/13/2011	12:31:57 PM	Bypass valve closed
5/13/2011	12:31:57 PM	H2 valve opened
5/13/2011	12:31:57 PM	BCl3 valve opened
5/13/2011	12:31:57 PM	SiCl4 pre valve opened
5/13/2011	12:31:57 PM	SiCl4 post valve opened
5/13/2011	12:31:57 PM	Bubbler valve opened
5/13/2011	12:31:57 PM	Helium MFC set to  0.000000
5/13/2011	12:31:57 PM	H2 MFC set to  500.000000
5/13/2011	12:31:57 PM	BCl3 MFC set to  3.500000
5/13/2011	12:31:57 PM	PHl3 MFC set to  0.000000
5/13/2011	12:31:57 PM	SiCl4 MFC set to  50.000000
5/13/2011	12:31:57 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	12:31:57 PM	Tube furnace set to 1000
5/13/2011	12:41:57 PM	H2 valve closed
5/13/2011	12:41:57 PM	BCl3 valve closed
5/13/2011	12:41:57 PM	PH3 valve closed
5/13/2011	12:41:57 PM	SiCl4 pre valve closed
5/13/2011	12:41:57 PM	SiCl4 post valve closed
5/13/2011	12:41:57 PM	Main Vac valve closed
5/13/2011	12:41:57 PM	Bypass valve closed
5/13/2011	12:41:57 PM	Helium valve opened
5/13/2011	12:41:57 PM	Bubbler valve opened
5/13/2011	12:41:57 PM	Helium MFC set to  500.000000
5/13/2011	12:41:57 PM	H2 MFC set to  0.000000
5/13/2011	12:41:57 PM	BCl3 MFC set to  0.000000
5/13/2011	12:41:57 PM	PHl3 MFC set to  0.000000
5/13/2011	12:41:57 PM	SiCl4 MFC set to  0.000000
5/13/2011	12:41:57 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	12:41:57 PM	Tube furnace set to 0
5/13/2011	1:01:57 PM	Helium valve closed
5/13/2011	1:01:57 PM	H2 valve closed
5/13/2011	1:01:57 PM	BCl3 valve closed
5/13/2011	1:01:57 PM	PH3 valve closed
5/13/2011	1:01:57 PM	SiCl4 pre valve closed
5/13/2011	1:01:57 PM	SiCl4 post valve closed
5/13/2011	1:01:57 PM	Main Vac valve closed
5/13/2011	1:01:57 PM	Bypass valve closed
5/13/2011	1:01:57 PM	Bubbler valve closed
5/13/2011	1:01:57 PM	Helium MFC set to  0.000000
5/13/2011	1:01:57 PM	H2 MFC set to  0.000000
5/13/2011	1:01:57 PM	BCl3 MFC set to  0.000000
5/13/2011	1:01:57 PM	PHl3 MFC set to  0.000000
5/13/2011	1:01:57 PM	SiCl4 MFC set to  0.000000
5/13/2011	1:01:57 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	1:01:57 PM	Tube furnace set to 0
5/13/2011	1:01:57 PM	Run finished at 1:01 PM
5/13/2011	2:55:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/13/2011	2:55:07 PM	Recipe started at 2:55 PM
5/13/2011	2:55:07 PM	Helium valve closed
5/13/2011	2:55:07 PM	H2 valve closed
5/13/2011	2:55:07 PM	BCl3 valve closed
5/13/2011	2:55:07 PM	PH3 valve closed
5/13/2011	2:55:07 PM	SiCl4 pre valve closed
5/13/2011	2:55:07 PM	SiCl4 post valve closed
5/13/2011	2:55:07 PM	Main Vac valve closed
5/13/2011	2:55:07 PM	Bubbler valve closed
5/13/2011	2:55:07 PM	Bypass valve opened
5/13/2011	2:55:07 PM	Helium MFC set to  0.000000
5/13/2011	2:55:07 PM	H2 MFC set to  0.000000
5/13/2011	2:55:07 PM	BCl3 MFC set to  0.000000
5/13/2011	2:55:07 PM	PHl3 MFC set to  0.000000
5/13/2011	2:55:07 PM	SiCl4 MFC set to  0.000000
5/13/2011	2:55:07 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	2:55:07 PM	Tube furnace set to 0
5/13/2011	2:55:43 PM	Helium valve closed
5/13/2011	2:55:43 PM	H2 valve closed
5/13/2011	2:55:43 PM	BCl3 valve closed
5/13/2011	2:55:43 PM	PH3 valve closed
5/13/2011	2:55:43 PM	SiCl4 pre valve closed
5/13/2011	2:55:43 PM	SiCl4 post valve closed
5/13/2011	2:55:43 PM	Bubbler valve closed
5/13/2011	2:55:43 PM	Main Vac valve opened
5/13/2011	2:55:43 PM	Bypass valve opened
5/13/2011	2:55:43 PM	Helium MFC set to  0.000000
5/13/2011	2:55:43 PM	H2 MFC set to  0.000000
5/13/2011	2:55:43 PM	BCl3 MFC set to  0.000000
5/13/2011	2:55:43 PM	PHl3 MFC set to  0.000000
5/13/2011	2:55:43 PM	SiCl4 MFC set to  0.000000
5/13/2011	2:55:43 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	2:55:43 PM	Tube furnace set to 0
5/13/2011	2:55:43 PM	Run finished at 2:55 PM
5/13/2011	2:55:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/13/2011	2:57:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/13/2011	2:57:41 PM	Recipe started at 2:57 PM
5/13/2011	2:57:41 PM	Helium valve closed
5/13/2011	2:57:41 PM	H2 valve closed
5/13/2011	2:57:41 PM	BCl3 valve closed
5/13/2011	2:57:41 PM	PH3 valve closed
5/13/2011	2:57:41 PM	SiCl4 pre valve closed
5/13/2011	2:57:41 PM	SiCl4 post valve closed
5/13/2011	2:57:41 PM	Main Vac valve closed
5/13/2011	2:57:41 PM	Bubbler valve closed
5/13/2011	2:57:41 PM	Bypass valve opened
5/13/2011	2:57:41 PM	Helium MFC set to  0.000000
5/13/2011	2:57:41 PM	H2 MFC set to  0.000000
5/13/2011	2:57:41 PM	BCl3 MFC set to  0.000000
5/13/2011	2:57:41 PM	PHl3 MFC set to  0.000000
5/13/2011	2:57:41 PM	SiCl4 MFC set to  0.000000
5/13/2011	2:57:41 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	2:57:41 PM	Tube furnace set to 0
5/13/2011	2:57:42 PM	Helium valve closed
5/13/2011	2:57:42 PM	H2 valve closed
5/13/2011	2:57:42 PM	BCl3 valve closed
5/13/2011	2:57:42 PM	PH3 valve closed
5/13/2011	2:57:42 PM	SiCl4 pre valve closed
5/13/2011	2:57:42 PM	SiCl4 post valve closed
5/13/2011	2:57:42 PM	Bubbler valve closed
5/13/2011	2:57:42 PM	Main Vac valve opened
5/13/2011	2:57:42 PM	Bypass valve opened
5/13/2011	2:57:42 PM	Helium MFC set to  0.000000
5/13/2011	2:57:42 PM	H2 MFC set to  0.000000
5/13/2011	2:57:42 PM	BCl3 MFC set to  0.000000
5/13/2011	2:57:42 PM	PHl3 MFC set to  0.000000
5/13/2011	2:57:42 PM	SiCl4 MFC set to  0.000000
5/13/2011	2:57:42 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	2:57:42 PM	Tube furnace set to 0
5/13/2011	2:57:45 PM	H2 valve closed
5/13/2011	2:57:45 PM	BCl3 valve closed
5/13/2011	2:57:45 PM	PH3 valve closed
5/13/2011	2:57:45 PM	SiCl4 pre valve closed
5/13/2011	2:57:45 PM	SiCl4 post valve closed
5/13/2011	2:57:45 PM	Bubbler valve closed
5/13/2011	2:57:45 PM	Helium valve opened
5/13/2011	2:57:45 PM	Main Vac valve opened
5/13/2011	2:57:45 PM	Bypass valve opened
5/13/2011	2:57:45 PM	Helium MFC set to  100.000000
5/13/2011	2:57:45 PM	H2 MFC set to  0.000000
5/13/2011	2:57:45 PM	BCl3 MFC set to  0.000000
5/13/2011	2:57:45 PM	PHl3 MFC set to  0.000000
5/13/2011	2:57:45 PM	SiCl4 MFC set to  0.000000
5/13/2011	2:57:45 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	2:57:45 PM	Tube furnace set to 0
5/13/2011	2:58:45 PM	Helium valve closed
5/13/2011	2:58:45 PM	H2 valve closed
5/13/2011	2:58:45 PM	BCl3 valve closed
5/13/2011	2:58:45 PM	PH3 valve closed
5/13/2011	2:58:45 PM	SiCl4 pre valve closed
5/13/2011	2:58:45 PM	SiCl4 post valve closed
5/13/2011	2:58:45 PM	Bubbler valve closed
5/13/2011	2:58:45 PM	Main Vac valve opened
5/13/2011	2:58:45 PM	Bypass valve opened
5/13/2011	2:58:45 PM	Helium MFC set to  0.000000
5/13/2011	2:58:45 PM	H2 MFC set to  0.000000
5/13/2011	2:58:45 PM	BCl3 MFC set to  0.000000
5/13/2011	2:58:45 PM	PHl3 MFC set to  0.000000
5/13/2011	2:58:45 PM	SiCl4 MFC set to  0.000000
5/13/2011	2:58:45 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	2:58:45 PM	Tube furnace set to 0
5/13/2011	2:59:45 PM	H2 valve closed
5/13/2011	2:59:45 PM	BCl3 valve closed
5/13/2011	2:59:45 PM	PH3 valve closed
5/13/2011	2:59:45 PM	SiCl4 pre valve closed
5/13/2011	2:59:45 PM	SiCl4 post valve closed
5/13/2011	2:59:45 PM	Bubbler valve closed
5/13/2011	2:59:45 PM	Helium valve opened
5/13/2011	2:59:45 PM	Main Vac valve opened
5/13/2011	2:59:45 PM	Bypass valve opened
5/13/2011	2:59:45 PM	Helium MFC set to  100.000000
5/13/2011	2:59:45 PM	H2 MFC set to  0.000000
5/13/2011	2:59:45 PM	BCl3 MFC set to  0.000000
5/13/2011	2:59:45 PM	PHl3 MFC set to  0.000000
5/13/2011	2:59:45 PM	SiCl4 MFC set to  0.000000
5/13/2011	2:59:45 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	2:59:45 PM	Tube furnace set to 0
5/13/2011	3:00:45 PM	Helium valve closed
5/13/2011	3:00:45 PM	H2 valve closed
5/13/2011	3:00:45 PM	BCl3 valve closed
5/13/2011	3:00:45 PM	PH3 valve closed
5/13/2011	3:00:45 PM	SiCl4 pre valve closed
5/13/2011	3:00:45 PM	SiCl4 post valve closed
5/13/2011	3:00:45 PM	Bubbler valve closed
5/13/2011	3:00:45 PM	Main Vac valve opened
5/13/2011	3:00:45 PM	Bypass valve opened
5/13/2011	3:00:45 PM	Helium MFC set to  0.000000
5/13/2011	3:00:45 PM	H2 MFC set to  0.000000
5/13/2011	3:00:45 PM	BCl3 MFC set to  0.000000
5/13/2011	3:00:45 PM	PHl3 MFC set to  0.000000
5/13/2011	3:00:45 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:00:45 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:00:45 PM	Tube furnace set to 0
5/13/2011	3:01:45 PM	H2 valve closed
5/13/2011	3:01:45 PM	BCl3 valve closed
5/13/2011	3:01:45 PM	PH3 valve closed
5/13/2011	3:01:45 PM	SiCl4 pre valve closed
5/13/2011	3:01:45 PM	SiCl4 post valve closed
5/13/2011	3:01:45 PM	Bubbler valve closed
5/13/2011	3:01:45 PM	Helium valve opened
5/13/2011	3:01:45 PM	Main Vac valve opened
5/13/2011	3:01:45 PM	Bypass valve opened
5/13/2011	3:01:45 PM	Helium MFC set to  100.000000
5/13/2011	3:01:45 PM	H2 MFC set to  0.000000
5/13/2011	3:01:45 PM	BCl3 MFC set to  0.000000
5/13/2011	3:01:45 PM	PHl3 MFC set to  0.000000
5/13/2011	3:01:45 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:01:45 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:01:46 PM	Tube furnace set to 0
5/13/2011	3:02:46 PM	Helium valve closed
5/13/2011	3:02:46 PM	H2 valve closed
5/13/2011	3:02:46 PM	BCl3 valve closed
5/13/2011	3:02:46 PM	PH3 valve closed
5/13/2011	3:02:46 PM	SiCl4 pre valve closed
5/13/2011	3:02:46 PM	SiCl4 post valve closed
5/13/2011	3:02:46 PM	Bubbler valve closed
5/13/2011	3:02:46 PM	Main Vac valve opened
5/13/2011	3:02:46 PM	Bypass valve opened
5/13/2011	3:02:46 PM	Helium MFC set to  0.000000
5/13/2011	3:02:46 PM	H2 MFC set to  0.000000
5/13/2011	3:02:46 PM	BCl3 MFC set to  0.000000
5/13/2011	3:02:46 PM	PHl3 MFC set to  0.000000
5/13/2011	3:02:46 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:02:46 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:02:46 PM	Tube furnace set to 0
5/13/2011	3:03:46 PM	H2 valve closed
5/13/2011	3:03:46 PM	BCl3 valve closed
5/13/2011	3:03:46 PM	PH3 valve closed
5/13/2011	3:03:46 PM	SiCl4 pre valve closed
5/13/2011	3:03:46 PM	SiCl4 post valve closed
5/13/2011	3:03:46 PM	Bubbler valve closed
5/13/2011	3:03:46 PM	Helium valve opened
5/13/2011	3:03:46 PM	Main Vac valve opened
5/13/2011	3:03:46 PM	Bypass valve opened
5/13/2011	3:03:46 PM	Helium MFC set to  100.000000
5/13/2011	3:03:46 PM	H2 MFC set to  0.000000
5/13/2011	3:03:46 PM	BCl3 MFC set to  0.000000
5/13/2011	3:03:46 PM	PHl3 MFC set to  0.000000
5/13/2011	3:03:46 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:03:46 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:03:46 PM	Tube furnace set to 0
5/13/2011	3:04:46 PM	Helium valve closed
5/13/2011	3:04:46 PM	H2 valve closed
5/13/2011	3:04:46 PM	BCl3 valve closed
5/13/2011	3:04:46 PM	PH3 valve closed
5/13/2011	3:04:46 PM	SiCl4 pre valve closed
5/13/2011	3:04:46 PM	SiCl4 post valve closed
5/13/2011	3:04:46 PM	Bubbler valve closed
5/13/2011	3:04:46 PM	Main Vac valve opened
5/13/2011	3:04:46 PM	Bypass valve opened
5/13/2011	3:04:46 PM	Helium MFC set to  0.000000
5/13/2011	3:04:46 PM	H2 MFC set to  0.000000
5/13/2011	3:04:46 PM	BCl3 MFC set to  0.000000
5/13/2011	3:04:46 PM	PHl3 MFC set to  0.000000
5/13/2011	3:04:46 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:04:46 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:04:46 PM	Tube furnace set to 0
5/13/2011	3:05:46 PM	H2 valve closed
5/13/2011	3:05:46 PM	BCl3 valve closed
5/13/2011	3:05:46 PM	PH3 valve closed
5/13/2011	3:05:46 PM	SiCl4 pre valve closed
5/13/2011	3:05:46 PM	SiCl4 post valve closed
5/13/2011	3:05:46 PM	Bubbler valve closed
5/13/2011	3:05:46 PM	Helium valve opened
5/13/2011	3:05:46 PM	Main Vac valve opened
5/13/2011	3:05:46 PM	Bypass valve opened
5/13/2011	3:05:46 PM	Helium MFC set to  100.000000
5/13/2011	3:05:46 PM	H2 MFC set to  0.000000
5/13/2011	3:05:46 PM	BCl3 MFC set to  0.000000
5/13/2011	3:05:46 PM	PHl3 MFC set to  0.000000
5/13/2011	3:05:46 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:05:46 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:05:46 PM	Tube furnace set to 0
5/13/2011	3:06:46 PM	Helium valve closed
5/13/2011	3:06:46 PM	H2 valve closed
5/13/2011	3:06:46 PM	BCl3 valve closed
5/13/2011	3:06:46 PM	PH3 valve closed
5/13/2011	3:06:46 PM	SiCl4 pre valve closed
5/13/2011	3:06:46 PM	SiCl4 post valve closed
5/13/2011	3:06:46 PM	Bubbler valve closed
5/13/2011	3:06:46 PM	Main Vac valve opened
5/13/2011	3:06:46 PM	Bypass valve opened
5/13/2011	3:06:46 PM	Helium MFC set to  0.000000
5/13/2011	3:06:46 PM	H2 MFC set to  0.000000
5/13/2011	3:06:46 PM	BCl3 MFC set to  0.000000
5/13/2011	3:06:46 PM	PHl3 MFC set to  0.000000
5/13/2011	3:06:46 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:06:46 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:06:47 PM	Tube furnace set to 0
5/13/2011	3:07:47 PM	H2 valve closed
5/13/2011	3:07:47 PM	BCl3 valve closed
5/13/2011	3:07:47 PM	PH3 valve closed
5/13/2011	3:07:47 PM	SiCl4 pre valve closed
5/13/2011	3:07:47 PM	SiCl4 post valve closed
5/13/2011	3:07:47 PM	Bubbler valve closed
5/13/2011	3:07:47 PM	Helium valve opened
5/13/2011	3:07:47 PM	Main Vac valve opened
5/13/2011	3:07:47 PM	Bypass valve opened
5/13/2011	3:07:47 PM	Helium MFC set to  100.000000
5/13/2011	3:07:47 PM	H2 MFC set to  0.000000
5/13/2011	3:07:47 PM	BCl3 MFC set to  0.000000
5/13/2011	3:07:47 PM	PHl3 MFC set to  0.000000
5/13/2011	3:07:47 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:07:47 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:07:47 PM	Tube furnace set to 0
5/13/2011	3:08:47 PM	Helium valve closed
5/13/2011	3:08:47 PM	H2 valve closed
5/13/2011	3:08:47 PM	BCl3 valve closed
5/13/2011	3:08:47 PM	PH3 valve closed
5/13/2011	3:08:47 PM	SiCl4 pre valve closed
5/13/2011	3:08:47 PM	SiCl4 post valve closed
5/13/2011	3:08:47 PM	Bubbler valve closed
5/13/2011	3:08:47 PM	Main Vac valve opened
5/13/2011	3:08:47 PM	Bypass valve opened
5/13/2011	3:08:47 PM	Helium MFC set to  0.000000
5/13/2011	3:08:47 PM	H2 MFC set to  0.000000
5/13/2011	3:08:47 PM	BCl3 MFC set to  0.000000
5/13/2011	3:08:47 PM	PHl3 MFC set to  0.000000
5/13/2011	3:08:47 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:08:47 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:08:47 PM	Tube furnace set to 0
5/13/2011	3:09:47 PM	H2 valve closed
5/13/2011	3:09:47 PM	BCl3 valve closed
5/13/2011	3:09:47 PM	PH3 valve closed
5/13/2011	3:09:47 PM	SiCl4 pre valve closed
5/13/2011	3:09:47 PM	SiCl4 post valve closed
5/13/2011	3:09:47 PM	Bubbler valve closed
5/13/2011	3:09:47 PM	Helium valve opened
5/13/2011	3:09:47 PM	Main Vac valve opened
5/13/2011	3:09:47 PM	Bypass valve opened
5/13/2011	3:09:47 PM	Helium MFC set to  100.000000
5/13/2011	3:09:47 PM	H2 MFC set to  0.000000
5/13/2011	3:09:47 PM	BCl3 MFC set to  0.000000
5/13/2011	3:09:47 PM	PHl3 MFC set to  0.000000
5/13/2011	3:09:47 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:09:47 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:09:47 PM	Tube furnace set to 0
5/13/2011	3:10:47 PM	Helium valve closed
5/13/2011	3:10:47 PM	H2 valve closed
5/13/2011	3:10:47 PM	BCl3 valve closed
5/13/2011	3:10:47 PM	PH3 valve closed
5/13/2011	3:10:47 PM	SiCl4 pre valve closed
5/13/2011	3:10:47 PM	SiCl4 post valve closed
5/13/2011	3:10:47 PM	Bubbler valve closed
5/13/2011	3:10:47 PM	Main Vac valve opened
5/13/2011	3:10:47 PM	Bypass valve opened
5/13/2011	3:10:47 PM	Helium MFC set to  0.000000
5/13/2011	3:10:47 PM	H2 MFC set to  0.000000
5/13/2011	3:10:47 PM	BCl3 MFC set to  0.000000
5/13/2011	3:10:47 PM	PHl3 MFC set to  0.000000
5/13/2011	3:10:47 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:10:47 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:10:47 PM	Tube furnace set to 0
5/13/2011	3:11:47 PM	H2 valve closed
5/13/2011	3:11:47 PM	BCl3 valve closed
5/13/2011	3:11:47 PM	PH3 valve closed
5/13/2011	3:11:47 PM	SiCl4 pre valve closed
5/13/2011	3:11:47 PM	SiCl4 post valve closed
5/13/2011	3:11:47 PM	Bubbler valve closed
5/13/2011	3:11:47 PM	Helium valve opened
5/13/2011	3:11:47 PM	Main Vac valve opened
5/13/2011	3:11:47 PM	Bypass valve opened
5/13/2011	3:11:47 PM	Helium MFC set to  100.000000
5/13/2011	3:11:47 PM	H2 MFC set to  0.000000
5/13/2011	3:11:48 PM	BCl3 MFC set to  0.000000
5/13/2011	3:11:48 PM	PHl3 MFC set to  0.000000
5/13/2011	3:11:48 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:11:48 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:11:48 PM	Tube furnace set to 0
5/13/2011	3:12:48 PM	Helium valve closed
5/13/2011	3:12:48 PM	H2 valve closed
5/13/2011	3:12:48 PM	BCl3 valve closed
5/13/2011	3:12:48 PM	PH3 valve closed
5/13/2011	3:12:48 PM	SiCl4 pre valve closed
5/13/2011	3:12:48 PM	SiCl4 post valve closed
5/13/2011	3:12:48 PM	Bubbler valve closed
5/13/2011	3:12:48 PM	Main Vac valve opened
5/13/2011	3:12:48 PM	Bypass valve opened
5/13/2011	3:12:48 PM	Helium MFC set to  0.000000
5/13/2011	3:12:48 PM	H2 MFC set to  0.000000
5/13/2011	3:12:48 PM	BCl3 MFC set to  0.000000
5/13/2011	3:12:48 PM	PHl3 MFC set to  0.000000
5/13/2011	3:12:48 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:12:48 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:12:48 PM	Tube furnace set to 0
5/13/2011	3:13:48 PM	H2 valve closed
5/13/2011	3:13:48 PM	BCl3 valve closed
5/13/2011	3:13:48 PM	PH3 valve closed
5/13/2011	3:13:48 PM	SiCl4 pre valve closed
5/13/2011	3:13:48 PM	SiCl4 post valve closed
5/13/2011	3:13:48 PM	Bubbler valve closed
5/13/2011	3:13:48 PM	Helium valve opened
5/13/2011	3:13:48 PM	Main Vac valve opened
5/13/2011	3:13:48 PM	Bypass valve opened
5/13/2011	3:13:48 PM	Helium MFC set to  100.000000
5/13/2011	3:13:48 PM	H2 MFC set to  0.000000
5/13/2011	3:13:48 PM	BCl3 MFC set to  0.000000
5/13/2011	3:13:48 PM	PHl3 MFC set to  0.000000
5/13/2011	3:13:48 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:13:48 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:13:48 PM	Tube furnace set to 0
5/13/2011	3:13:49 PM	Helium valve closed
5/13/2011	3:13:49 PM	H2 valve closed
5/13/2011	3:13:49 PM	BCl3 valve closed
5/13/2011	3:13:49 PM	PH3 valve closed
5/13/2011	3:13:49 PM	SiCl4 pre valve closed
5/13/2011	3:13:49 PM	SiCl4 post valve closed
5/13/2011	3:13:49 PM	Bubbler valve closed
5/13/2011	3:13:49 PM	Main Vac valve opened
5/13/2011	3:13:49 PM	Bypass valve opened
5/13/2011	3:13:49 PM	Helium MFC set to  0.000000
5/13/2011	3:13:49 PM	H2 MFC set to  0.000000
5/13/2011	3:13:49 PM	BCl3 MFC set to  0.000000
5/13/2011	3:13:49 PM	PHl3 MFC set to  0.000000
5/13/2011	3:13:49 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:13:49 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:13:49 PM	Tube furnace set to 0
5/13/2011	3:13:53 PM	H2 valve closed
5/13/2011	3:13:53 PM	BCl3 valve closed
5/13/2011	3:13:53 PM	PH3 valve closed
5/13/2011	3:13:53 PM	SiCl4 pre valve closed
5/13/2011	3:13:53 PM	SiCl4 post valve closed
5/13/2011	3:13:53 PM	Bubbler valve closed
5/13/2011	3:13:53 PM	Helium valve opened
5/13/2011	3:13:53 PM	Main Vac valve opened
5/13/2011	3:13:53 PM	Bypass valve opened
5/13/2011	3:13:53 PM	Helium MFC set to  100.000000
5/13/2011	3:13:53 PM	H2 MFC set to  0.000000
5/13/2011	3:13:53 PM	BCl3 MFC set to  0.000000
5/13/2011	3:13:53 PM	PHl3 MFC set to  0.000000
5/13/2011	3:13:53 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:13:53 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:13:53 PM	Tube furnace set to 0
5/13/2011	3:13:56 PM	Helium valve closed
5/13/2011	3:13:56 PM	H2 valve closed
5/13/2011	3:13:56 PM	BCl3 valve closed
5/13/2011	3:13:56 PM	PH3 valve closed
5/13/2011	3:13:56 PM	SiCl4 pre valve closed
5/13/2011	3:13:56 PM	SiCl4 post valve closed
5/13/2011	3:13:56 PM	Bubbler valve closed
5/13/2011	3:13:56 PM	Main Vac valve opened
5/13/2011	3:13:56 PM	Bypass valve opened
5/13/2011	3:13:56 PM	Helium MFC set to  0.000000
5/13/2011	3:13:56 PM	H2 MFC set to  0.000000
5/13/2011	3:13:56 PM	BCl3 MFC set to  0.000000
5/13/2011	3:13:56 PM	PHl3 MFC set to  0.000000
5/13/2011	3:13:56 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:13:56 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:13:56 PM	Tube furnace set to 0
5/13/2011	3:13:57 PM	Run finished at 3:13 PM
5/13/2011	3:13:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/13/2011	3:14:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/13/2011	3:14:08 PM	Recipe started at 3:14 PM
5/13/2011	3:14:08 PM	H2 valve closed
5/13/2011	3:14:08 PM	BCl3 valve closed
5/13/2011	3:14:08 PM	PH3 valve closed
5/13/2011	3:14:08 PM	SiCl4 pre valve closed
5/13/2011	3:14:08 PM	SiCl4 post valve closed
5/13/2011	3:14:08 PM	Main Vac valve closed
5/13/2011	3:14:08 PM	Bypass valve closed
5/13/2011	3:14:08 PM	Bubbler valve closed
5/13/2011	3:14:08 PM	Helium valve opened
5/13/2011	3:14:08 PM	Helium MFC set to  500.000000
5/13/2011	3:14:08 PM	H2 MFC set to  0.000000
5/13/2011	3:14:08 PM	BCl3 MFC set to  0.000000
5/13/2011	3:14:08 PM	PHl3 MFC set to  0.000000
5/13/2011	3:14:08 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:14:08 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:14:08 PM	Tube furnace set to 0
5/13/2011	3:14:20 PM	Run aborted at 3:14 PM
5/13/2011	3:14:20 PM	Helium valve closed
5/13/2011	3:14:20 PM	H2 valve closed
5/13/2011	3:14:20 PM	BCl3 valve closed
5/13/2011	3:14:20 PM	PH3 valve closed
5/13/2011	3:14:20 PM	SiCl4 pre valve closed
5/13/2011	3:14:20 PM	SiCl4 post valve closed
5/13/2011	3:14:20 PM	Bypass valve closed
5/13/2011	3:14:20 PM	Main Vac valve closed
5/13/2011	3:14:20 PM	Bubbler valve closed
5/13/2011	3:14:20 PM	Helium MFC set to  0.000000
5/13/2011	3:14:20 PM	H2 MFC set to  0.000000
5/13/2011	3:14:20 PM	BCl3 MFC set to  0.000000
5/13/2011	3:14:20 PM	PHl3 MFC set to  0.000000
5/13/2011	3:14:20 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:14:20 PM	Tube furnace set to 0
5/13/2011	3:14:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/13/2011	3:14:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/13/2011	3:14:22 PM	Recipe started at 3:14 PM
5/13/2011	3:14:22 PM	Helium valve closed
5/13/2011	3:14:22 PM	H2 valve closed
5/13/2011	3:14:22 PM	BCl3 valve closed
5/13/2011	3:14:22 PM	PH3 valve closed
5/13/2011	3:14:22 PM	SiCl4 pre valve closed
5/13/2011	3:14:22 PM	SiCl4 post valve closed
5/13/2011	3:14:22 PM	Main Vac valve closed
5/13/2011	3:14:22 PM	Bubbler valve closed
5/13/2011	3:14:22 PM	Bypass valve opened
5/13/2011	3:14:22 PM	Helium MFC set to  0.000000
5/13/2011	3:14:22 PM	H2 MFC set to  0.000000
5/13/2011	3:14:22 PM	BCl3 MFC set to  0.000000
5/13/2011	3:14:22 PM	PHl3 MFC set to  0.000000
5/13/2011	3:14:22 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:14:22 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:14:22 PM	Tube furnace set to 0
5/13/2011	3:14:31 PM	Helium valve closed
5/13/2011	3:14:31 PM	H2 valve closed
5/13/2011	3:14:31 PM	BCl3 valve closed
5/13/2011	3:14:31 PM	PH3 valve closed
5/13/2011	3:14:31 PM	SiCl4 pre valve closed
5/13/2011	3:14:31 PM	SiCl4 post valve closed
5/13/2011	3:14:31 PM	Bubbler valve closed
5/13/2011	3:14:31 PM	Main Vac valve opened
5/13/2011	3:14:31 PM	Bypass valve opened
5/13/2011	3:14:31 PM	Helium MFC set to  0.000000
5/13/2011	3:14:31 PM	H2 MFC set to  0.000000
5/13/2011	3:14:31 PM	BCl3 MFC set to  0.000000
5/13/2011	3:14:31 PM	PHl3 MFC set to  0.000000
5/13/2011	3:14:31 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:14:31 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:14:31 PM	Tube furnace set to 0
5/13/2011	3:14:32 PM	Run finished at 3:14 PM
5/13/2011	3:14:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/13/2011	3:15:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/13/2011	3:15:47 PM	Recipe started at 3:15 PM
5/13/2011	3:15:47 PM	Helium valve closed
5/13/2011	3:15:47 PM	H2 valve closed
5/13/2011	3:15:47 PM	BCl3 valve closed
5/13/2011	3:15:47 PM	PH3 valve closed
5/13/2011	3:15:47 PM	SiCl4 pre valve closed
5/13/2011	3:15:47 PM	SiCl4 post valve closed
5/13/2011	3:15:47 PM	Main Vac valve closed
5/13/2011	3:15:47 PM	Bubbler valve closed
5/13/2011	3:15:47 PM	Bypass valve opened
5/13/2011	3:15:47 PM	Helium MFC set to  0.000000
5/13/2011	3:15:47 PM	H2 MFC set to  0.000000
5/13/2011	3:15:47 PM	BCl3 MFC set to  0.000000
5/13/2011	3:15:47 PM	PHl3 MFC set to  0.000000
5/13/2011	3:15:47 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:15:47 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:15:47 PM	Tube furnace set to 0
5/13/2011	3:15:48 PM	Helium valve closed
5/13/2011	3:15:48 PM	H2 valve closed
5/13/2011	3:15:48 PM	BCl3 valve closed
5/13/2011	3:15:48 PM	PH3 valve closed
5/13/2011	3:15:48 PM	SiCl4 pre valve closed
5/13/2011	3:15:48 PM	SiCl4 post valve closed
5/13/2011	3:15:48 PM	Bubbler valve closed
5/13/2011	3:15:48 PM	Main Vac valve opened
5/13/2011	3:15:48 PM	Bypass valve opened
5/13/2011	3:15:48 PM	Helium MFC set to  0.000000
5/13/2011	3:15:48 PM	H2 MFC set to  0.000000
5/13/2011	3:15:48 PM	BCl3 MFC set to  0.000000
5/13/2011	3:15:48 PM	PHl3 MFC set to  0.000000
5/13/2011	3:15:48 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:15:48 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:15:48 PM	Tube furnace set to 0
5/13/2011	3:16:48 PM	H2 valve closed
5/13/2011	3:16:48 PM	BCl3 valve closed
5/13/2011	3:16:48 PM	PH3 valve closed
5/13/2011	3:16:48 PM	SiCl4 pre valve closed
5/13/2011	3:16:48 PM	SiCl4 post valve closed
5/13/2011	3:16:48 PM	Bubbler valve closed
5/13/2011	3:16:48 PM	Helium valve opened
5/13/2011	3:16:48 PM	Main Vac valve opened
5/13/2011	3:16:48 PM	Bypass valve opened
5/13/2011	3:16:48 PM	Helium MFC set to  100.000000
5/13/2011	3:16:48 PM	H2 MFC set to  0.000000
5/13/2011	3:16:48 PM	BCl3 MFC set to  0.000000
5/13/2011	3:16:48 PM	PHl3 MFC set to  0.000000
5/13/2011	3:16:48 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:16:48 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:16:48 PM	Tube furnace set to 0
5/13/2011	3:17:48 PM	Helium valve closed
5/13/2011	3:17:48 PM	H2 valve closed
5/13/2011	3:17:48 PM	BCl3 valve closed
5/13/2011	3:17:48 PM	PH3 valve closed
5/13/2011	3:17:48 PM	SiCl4 pre valve closed
5/13/2011	3:17:48 PM	SiCl4 post valve closed
5/13/2011	3:17:48 PM	Bubbler valve closed
5/13/2011	3:17:48 PM	Main Vac valve opened
5/13/2011	3:17:48 PM	Bypass valve opened
5/13/2011	3:17:48 PM	Helium MFC set to  0.000000
5/13/2011	3:17:48 PM	H2 MFC set to  0.000000
5/13/2011	3:17:48 PM	BCl3 MFC set to  0.000000
5/13/2011	3:17:48 PM	PHl3 MFC set to  0.000000
5/13/2011	3:17:48 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:17:48 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:17:48 PM	Tube furnace set to 0
5/13/2011	3:18:48 PM	H2 valve closed
5/13/2011	3:18:48 PM	BCl3 valve closed
5/13/2011	3:18:48 PM	PH3 valve closed
5/13/2011	3:18:48 PM	SiCl4 pre valve closed
5/13/2011	3:18:48 PM	SiCl4 post valve closed
5/13/2011	3:18:48 PM	Bubbler valve closed
5/13/2011	3:18:48 PM	Helium valve opened
5/13/2011	3:18:48 PM	Main Vac valve opened
5/13/2011	3:18:48 PM	Bypass valve opened
5/13/2011	3:18:48 PM	Helium MFC set to  100.000000
5/13/2011	3:18:48 PM	H2 MFC set to  0.000000
5/13/2011	3:18:48 PM	BCl3 MFC set to  0.000000
5/13/2011	3:18:48 PM	PHl3 MFC set to  0.000000
5/13/2011	3:18:48 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:18:48 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:18:48 PM	Tube furnace set to 0
5/13/2011	3:19:48 PM	Helium valve closed
5/13/2011	3:19:48 PM	H2 valve closed
5/13/2011	3:19:48 PM	BCl3 valve closed
5/13/2011	3:19:48 PM	PH3 valve closed
5/13/2011	3:19:48 PM	SiCl4 pre valve closed
5/13/2011	3:19:48 PM	SiCl4 post valve closed
5/13/2011	3:19:48 PM	Bubbler valve closed
5/13/2011	3:19:48 PM	Main Vac valve opened
5/13/2011	3:19:48 PM	Bypass valve opened
5/13/2011	3:19:48 PM	Helium MFC set to  0.000000
5/13/2011	3:19:48 PM	H2 MFC set to  0.000000
5/13/2011	3:19:48 PM	BCl3 MFC set to  0.000000
5/13/2011	3:19:48 PM	PHl3 MFC set to  0.000000
5/13/2011	3:19:48 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:19:48 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:19:49 PM	Tube furnace set to 0
5/13/2011	3:20:49 PM	H2 valve closed
5/13/2011	3:20:49 PM	BCl3 valve closed
5/13/2011	3:20:49 PM	PH3 valve closed
5/13/2011	3:20:49 PM	SiCl4 pre valve closed
5/13/2011	3:20:49 PM	SiCl4 post valve closed
5/13/2011	3:20:49 PM	Bubbler valve closed
5/13/2011	3:20:49 PM	Helium valve opened
5/13/2011	3:20:49 PM	Main Vac valve opened
5/13/2011	3:20:49 PM	Bypass valve opened
5/13/2011	3:20:49 PM	Helium MFC set to  100.000000
5/13/2011	3:20:49 PM	H2 MFC set to  0.000000
5/13/2011	3:20:49 PM	BCl3 MFC set to  0.000000
5/13/2011	3:20:49 PM	PHl3 MFC set to  0.000000
5/13/2011	3:20:49 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:20:49 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:20:49 PM	Tube furnace set to 0
5/13/2011	3:21:49 PM	Helium valve closed
5/13/2011	3:21:49 PM	H2 valve closed
5/13/2011	3:21:49 PM	BCl3 valve closed
5/13/2011	3:21:49 PM	PH3 valve closed
5/13/2011	3:21:49 PM	SiCl4 pre valve closed
5/13/2011	3:21:49 PM	SiCl4 post valve closed
5/13/2011	3:21:49 PM	Bubbler valve closed
5/13/2011	3:21:49 PM	Main Vac valve opened
5/13/2011	3:21:49 PM	Bypass valve opened
5/13/2011	3:21:49 PM	Helium MFC set to  0.000000
5/13/2011	3:21:49 PM	H2 MFC set to  0.000000
5/13/2011	3:21:49 PM	BCl3 MFC set to  0.000000
5/13/2011	3:21:49 PM	PHl3 MFC set to  0.000000
5/13/2011	3:21:49 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:21:49 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:21:49 PM	Tube furnace set to 0
5/13/2011	3:22:49 PM	H2 valve closed
5/13/2011	3:22:49 PM	BCl3 valve closed
5/13/2011	3:22:49 PM	PH3 valve closed
5/13/2011	3:22:49 PM	SiCl4 pre valve closed
5/13/2011	3:22:49 PM	SiCl4 post valve closed
5/13/2011	3:22:49 PM	Bubbler valve closed
5/13/2011	3:22:49 PM	Helium valve opened
5/13/2011	3:22:49 PM	Main Vac valve opened
5/13/2011	3:22:49 PM	Bypass valve opened
5/13/2011	3:22:49 PM	Helium MFC set to  100.000000
5/13/2011	3:22:49 PM	H2 MFC set to  0.000000
5/13/2011	3:22:49 PM	BCl3 MFC set to  0.000000
5/13/2011	3:22:49 PM	PHl3 MFC set to  0.000000
5/13/2011	3:22:49 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:22:49 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:22:49 PM	Tube furnace set to 0
5/13/2011	3:23:49 PM	Helium valve closed
5/13/2011	3:23:49 PM	H2 valve closed
5/13/2011	3:23:49 PM	BCl3 valve closed
5/13/2011	3:23:49 PM	PH3 valve closed
5/13/2011	3:23:49 PM	SiCl4 pre valve closed
5/13/2011	3:23:49 PM	SiCl4 post valve closed
5/13/2011	3:23:49 PM	Bubbler valve closed
5/13/2011	3:23:49 PM	Main Vac valve opened
5/13/2011	3:23:49 PM	Bypass valve opened
5/13/2011	3:23:49 PM	Helium MFC set to  0.000000
5/13/2011	3:23:49 PM	H2 MFC set to  0.000000
5/13/2011	3:23:49 PM	BCl3 MFC set to  0.000000
5/13/2011	3:23:49 PM	PHl3 MFC set to  0.000000
5/13/2011	3:23:49 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:23:49 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:23:49 PM	Tube furnace set to 0
5/13/2011	3:24:49 PM	H2 valve closed
5/13/2011	3:24:49 PM	BCl3 valve closed
5/13/2011	3:24:49 PM	PH3 valve closed
5/13/2011	3:24:49 PM	SiCl4 pre valve closed
5/13/2011	3:24:49 PM	SiCl4 post valve closed
5/13/2011	3:24:49 PM	Bubbler valve closed
5/13/2011	3:24:49 PM	Helium valve opened
5/13/2011	3:24:49 PM	Main Vac valve opened
5/13/2011	3:24:49 PM	Bypass valve opened
5/13/2011	3:24:49 PM	Helium MFC set to  100.000000
5/13/2011	3:24:49 PM	H2 MFC set to  0.000000
5/13/2011	3:24:49 PM	BCl3 MFC set to  0.000000
5/13/2011	3:24:49 PM	PHl3 MFC set to  0.000000
5/13/2011	3:24:49 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:24:49 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:24:50 PM	Tube furnace set to 0
5/13/2011	3:25:50 PM	Helium valve closed
5/13/2011	3:25:50 PM	H2 valve closed
5/13/2011	3:25:50 PM	BCl3 valve closed
5/13/2011	3:25:50 PM	PH3 valve closed
5/13/2011	3:25:50 PM	SiCl4 pre valve closed
5/13/2011	3:25:50 PM	SiCl4 post valve closed
5/13/2011	3:25:50 PM	Bubbler valve closed
5/13/2011	3:25:50 PM	Main Vac valve opened
5/13/2011	3:25:50 PM	Bypass valve opened
5/13/2011	3:25:50 PM	Helium MFC set to  0.000000
5/13/2011	3:25:50 PM	H2 MFC set to  0.000000
5/13/2011	3:25:50 PM	BCl3 MFC set to  0.000000
5/13/2011	3:25:50 PM	PHl3 MFC set to  0.000000
5/13/2011	3:25:50 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:25:50 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:25:50 PM	Tube furnace set to 0
5/13/2011	3:26:50 PM	H2 valve closed
5/13/2011	3:26:50 PM	BCl3 valve closed
5/13/2011	3:26:50 PM	PH3 valve closed
5/13/2011	3:26:50 PM	SiCl4 pre valve closed
5/13/2011	3:26:50 PM	SiCl4 post valve closed
5/13/2011	3:26:50 PM	Bubbler valve closed
5/13/2011	3:26:50 PM	Helium valve opened
5/13/2011	3:26:50 PM	Main Vac valve opened
5/13/2011	3:26:50 PM	Bypass valve opened
5/13/2011	3:26:50 PM	Helium MFC set to  100.000000
5/13/2011	3:26:50 PM	H2 MFC set to  0.000000
5/13/2011	3:26:50 PM	BCl3 MFC set to  0.000000
5/13/2011	3:26:50 PM	PHl3 MFC set to  0.000000
5/13/2011	3:26:50 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:26:50 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:26:50 PM	Tube furnace set to 0
5/13/2011	3:27:50 PM	Helium valve closed
5/13/2011	3:27:50 PM	H2 valve closed
5/13/2011	3:27:50 PM	BCl3 valve closed
5/13/2011	3:27:50 PM	PH3 valve closed
5/13/2011	3:27:50 PM	SiCl4 pre valve closed
5/13/2011	3:27:50 PM	SiCl4 post valve closed
5/13/2011	3:27:50 PM	Bubbler valve closed
5/13/2011	3:27:50 PM	Main Vac valve opened
5/13/2011	3:27:50 PM	Bypass valve opened
5/13/2011	3:27:50 PM	Helium MFC set to  0.000000
5/13/2011	3:27:50 PM	H2 MFC set to  0.000000
5/13/2011	3:27:50 PM	BCl3 MFC set to  0.000000
5/13/2011	3:27:50 PM	PHl3 MFC set to  0.000000
5/13/2011	3:27:50 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:27:50 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:27:50 PM	Tube furnace set to 0
5/13/2011	3:28:50 PM	H2 valve closed
5/13/2011	3:28:50 PM	BCl3 valve closed
5/13/2011	3:28:50 PM	PH3 valve closed
5/13/2011	3:28:50 PM	SiCl4 pre valve closed
5/13/2011	3:28:50 PM	SiCl4 post valve closed
5/13/2011	3:28:50 PM	Bubbler valve closed
5/13/2011	3:28:50 PM	Helium valve opened
5/13/2011	3:28:50 PM	Main Vac valve opened
5/13/2011	3:28:50 PM	Bypass valve opened
5/13/2011	3:28:50 PM	Helium MFC set to  100.000000
5/13/2011	3:28:50 PM	H2 MFC set to  0.000000
5/13/2011	3:28:50 PM	BCl3 MFC set to  0.000000
5/13/2011	3:28:50 PM	PHl3 MFC set to  0.000000
5/13/2011	3:28:50 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:28:50 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:28:50 PM	Tube furnace set to 0
5/13/2011	3:29:50 PM	Helium valve closed
5/13/2011	3:29:50 PM	H2 valve closed
5/13/2011	3:29:50 PM	BCl3 valve closed
5/13/2011	3:29:50 PM	PH3 valve closed
5/13/2011	3:29:50 PM	SiCl4 pre valve closed
5/13/2011	3:29:50 PM	SiCl4 post valve closed
5/13/2011	3:29:50 PM	Bubbler valve closed
5/13/2011	3:29:50 PM	Main Vac valve opened
5/13/2011	3:29:50 PM	Bypass valve opened
5/13/2011	3:29:50 PM	Helium MFC set to  0.000000
5/13/2011	3:29:50 PM	H2 MFC set to  0.000000
5/13/2011	3:29:50 PM	BCl3 MFC set to  0.000000
5/13/2011	3:29:50 PM	PHl3 MFC set to  0.000000
5/13/2011	3:29:50 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:29:50 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:29:51 PM	Tube furnace set to 0
5/13/2011	3:30:51 PM	H2 valve closed
5/13/2011	3:30:51 PM	BCl3 valve closed
5/13/2011	3:30:51 PM	PH3 valve closed
5/13/2011	3:30:51 PM	SiCl4 pre valve closed
5/13/2011	3:30:51 PM	SiCl4 post valve closed
5/13/2011	3:30:51 PM	Bubbler valve closed
5/13/2011	3:30:51 PM	Helium valve opened
5/13/2011	3:30:51 PM	Main Vac valve opened
5/13/2011	3:30:51 PM	Bypass valve opened
5/13/2011	3:30:51 PM	Helium MFC set to  100.000000
5/13/2011	3:30:51 PM	H2 MFC set to  0.000000
5/13/2011	3:30:51 PM	BCl3 MFC set to  0.000000
5/13/2011	3:30:51 PM	PHl3 MFC set to  0.000000
5/13/2011	3:30:51 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:30:51 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:30:51 PM	Tube furnace set to 0
5/13/2011	3:31:51 PM	Helium valve closed
5/13/2011	3:31:51 PM	H2 valve closed
5/13/2011	3:31:51 PM	BCl3 valve closed
5/13/2011	3:31:51 PM	PH3 valve closed
5/13/2011	3:31:51 PM	SiCl4 pre valve closed
5/13/2011	3:31:51 PM	SiCl4 post valve closed
5/13/2011	3:31:51 PM	Bubbler valve closed
5/13/2011	3:31:51 PM	Main Vac valve opened
5/13/2011	3:31:51 PM	Bypass valve opened
5/13/2011	3:31:51 PM	Helium MFC set to  0.000000
5/13/2011	3:31:51 PM	H2 MFC set to  0.000000
5/13/2011	3:31:51 PM	BCl3 MFC set to  0.000000
5/13/2011	3:31:51 PM	PHl3 MFC set to  0.000000
5/13/2011	3:31:51 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:31:51 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:31:51 PM	Tube furnace set to 0
5/13/2011	3:32:51 PM	H2 valve closed
5/13/2011	3:32:51 PM	BCl3 valve closed
5/13/2011	3:32:51 PM	PH3 valve closed
5/13/2011	3:32:51 PM	SiCl4 pre valve closed
5/13/2011	3:32:51 PM	SiCl4 post valve closed
5/13/2011	3:32:51 PM	Bubbler valve closed
5/13/2011	3:32:51 PM	Helium valve opened
5/13/2011	3:32:51 PM	Main Vac valve opened
5/13/2011	3:32:51 PM	Bypass valve opened
5/13/2011	3:32:51 PM	Helium MFC set to  100.000000
5/13/2011	3:32:51 PM	H2 MFC set to  0.000000
5/13/2011	3:32:51 PM	BCl3 MFC set to  0.000000
5/13/2011	3:32:51 PM	PHl3 MFC set to  0.000000
5/13/2011	3:32:51 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:32:51 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:32:51 PM	Tube furnace set to 0
5/13/2011	3:33:51 PM	Helium valve closed
5/13/2011	3:33:51 PM	H2 valve closed
5/13/2011	3:33:51 PM	BCl3 valve closed
5/13/2011	3:33:51 PM	PH3 valve closed
5/13/2011	3:33:51 PM	SiCl4 pre valve closed
5/13/2011	3:33:51 PM	SiCl4 post valve closed
5/13/2011	3:33:51 PM	Bubbler valve closed
5/13/2011	3:33:51 PM	Main Vac valve opened
5/13/2011	3:33:51 PM	Bypass valve opened
5/13/2011	3:33:51 PM	Helium MFC set to  0.000000
5/13/2011	3:33:51 PM	H2 MFC set to  0.000000
5/13/2011	3:33:51 PM	BCl3 MFC set to  0.000000
5/13/2011	3:33:51 PM	PHl3 MFC set to  0.000000
5/13/2011	3:33:51 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:33:51 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:33:51 PM	Tube furnace set to 0
5/13/2011	3:34:51 PM	H2 valve closed
5/13/2011	3:34:51 PM	BCl3 valve closed
5/13/2011	3:34:51 PM	PH3 valve closed
5/13/2011	3:34:51 PM	SiCl4 pre valve closed
5/13/2011	3:34:51 PM	SiCl4 post valve closed
5/13/2011	3:34:51 PM	Bubbler valve closed
5/13/2011	3:34:51 PM	Helium valve opened
5/13/2011	3:34:51 PM	Main Vac valve opened
5/13/2011	3:34:51 PM	Bypass valve opened
5/13/2011	3:34:51 PM	Helium MFC set to  100.000000
5/13/2011	3:34:51 PM	H2 MFC set to  0.000000
5/13/2011	3:34:51 PM	BCl3 MFC set to  0.000000
5/13/2011	3:34:51 PM	PHl3 MFC set to  0.000000
5/13/2011	3:34:51 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:34:51 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:34:52 PM	Tube furnace set to 0
5/13/2011	3:35:52 PM	Helium valve closed
5/13/2011	3:35:52 PM	H2 valve closed
5/13/2011	3:35:52 PM	BCl3 valve closed
5/13/2011	3:35:52 PM	PH3 valve closed
5/13/2011	3:35:52 PM	SiCl4 pre valve closed
5/13/2011	3:35:52 PM	SiCl4 post valve closed
5/13/2011	3:35:52 PM	Bubbler valve closed
5/13/2011	3:35:52 PM	Main Vac valve opened
5/13/2011	3:35:52 PM	Bypass valve opened
5/13/2011	3:35:52 PM	Helium MFC set to  0.000000
5/13/2011	3:35:52 PM	H2 MFC set to  0.000000
5/13/2011	3:35:52 PM	BCl3 MFC set to  0.000000
5/13/2011	3:35:52 PM	PHl3 MFC set to  0.000000
5/13/2011	3:35:52 PM	SiCl4 MFC set to  0.000000
5/13/2011	3:35:52 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	3:35:52 PM	Tube furnace set to 0
5/13/2011	3:35:53 PM	Run finished at 3:35 PM
5/13/2011	3:35:53 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/13/2011	4:24:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/13/2011	4:25:09 PM	Recipe started at 4:25 PM
5/13/2011	4:25:09 PM	Helium valve closed
5/13/2011	4:25:09 PM	H2 valve closed
5/13/2011	4:25:09 PM	BCl3 valve closed
5/13/2011	4:25:09 PM	PH3 valve closed
5/13/2011	4:25:09 PM	SiCl4 pre valve closed
5/13/2011	4:25:09 PM	SiCl4 post valve closed
5/13/2011	4:25:09 PM	Main Vac valve closed
5/13/2011	4:25:09 PM	Bubbler valve closed
5/13/2011	4:25:09 PM	Bypass valve opened
5/13/2011	4:25:09 PM	Helium MFC set to  0.000000
5/13/2011	4:25:09 PM	H2 MFC set to  0.000000
5/13/2011	4:25:09 PM	BCl3 MFC set to  0.000000
5/13/2011	4:25:09 PM	PHl3 MFC set to  0.000000
5/13/2011	4:25:09 PM	SiCl4 MFC set to  0.000000
5/13/2011	4:25:09 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	4:25:10 PM	Tube furnace set to 0
5/13/2011	4:25:10 PM	Helium valve closed
5/13/2011	4:25:10 PM	H2 valve closed
5/13/2011	4:25:10 PM	BCl3 valve closed
5/13/2011	4:25:10 PM	PH3 valve closed
5/13/2011	4:25:10 PM	SiCl4 pre valve closed
5/13/2011	4:25:10 PM	SiCl4 post valve closed
5/13/2011	4:25:10 PM	Bubbler valve closed
5/13/2011	4:25:10 PM	Main Vac valve opened
5/13/2011	4:25:10 PM	Bypass valve opened
5/13/2011	4:25:10 PM	Helium MFC set to  0.000000
5/13/2011	4:25:10 PM	H2 MFC set to  0.000000
5/13/2011	4:25:10 PM	BCl3 MFC set to  0.000000
5/13/2011	4:25:10 PM	PHl3 MFC set to  0.000000
5/13/2011	4:25:10 PM	SiCl4 MFC set to  0.000000
5/13/2011	4:25:10 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	4:25:10 PM	Tube furnace set to 0
5/13/2011	4:26:10 PM	H2 valve closed
5/13/2011	4:26:10 PM	BCl3 valve closed
5/13/2011	4:26:10 PM	PH3 valve closed
5/13/2011	4:26:10 PM	SiCl4 pre valve closed
5/13/2011	4:26:10 PM	SiCl4 post valve closed
5/13/2011	4:26:10 PM	Bubbler valve closed
5/13/2011	4:26:10 PM	Helium valve opened
5/13/2011	4:26:10 PM	Main Vac valve opened
5/13/2011	4:26:10 PM	Bypass valve opened
5/13/2011	4:26:10 PM	Helium MFC set to  100.000000
5/13/2011	4:26:10 PM	H2 MFC set to  0.000000
5/13/2011	4:26:10 PM	BCl3 MFC set to  0.000000
5/13/2011	4:26:10 PM	PHl3 MFC set to  0.000000
5/13/2011	4:26:10 PM	SiCl4 MFC set to  0.000000
5/13/2011	4:26:10 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	4:26:10 PM	Tube furnace set to 0
5/13/2011	4:27:10 PM	Helium valve closed
5/13/2011	4:27:10 PM	H2 valve closed
5/13/2011	4:27:10 PM	BCl3 valve closed
5/13/2011	4:27:10 PM	PH3 valve closed
5/13/2011	4:27:10 PM	SiCl4 pre valve closed
5/13/2011	4:27:10 PM	SiCl4 post valve closed
5/13/2011	4:27:10 PM	Bubbler valve closed
5/13/2011	4:27:10 PM	Main Vac valve opened
5/13/2011	4:27:10 PM	Bypass valve opened
5/13/2011	4:27:10 PM	Helium MFC set to  0.000000
5/13/2011	4:27:10 PM	H2 MFC set to  0.000000
5/13/2011	4:27:10 PM	BCl3 MFC set to  0.000000
5/13/2011	4:27:10 PM	PHl3 MFC set to  0.000000
5/13/2011	4:27:10 PM	SiCl4 MFC set to  0.000000
5/13/2011	4:27:10 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	4:27:10 PM	Tube furnace set to 0
5/13/2011	4:28:10 PM	H2 valve closed
5/13/2011	4:28:10 PM	BCl3 valve closed
5/13/2011	4:28:10 PM	PH3 valve closed
5/13/2011	4:28:10 PM	SiCl4 pre valve closed
5/13/2011	4:28:10 PM	SiCl4 post valve closed
5/13/2011	4:28:10 PM	Bubbler valve closed
5/13/2011	4:28:10 PM	Helium valve opened
5/13/2011	4:28:10 PM	Main Vac valve opened
5/13/2011	4:28:10 PM	Bypass valve opened
5/13/2011	4:28:10 PM	Helium MFC set to  100.000000
5/13/2011	4:28:10 PM	H2 MFC set to  0.000000
5/13/2011	4:28:10 PM	BCl3 MFC set to  0.000000
5/13/2011	4:28:10 PM	PHl3 MFC set to  0.000000
5/13/2011	4:28:10 PM	SiCl4 MFC set to  0.000000
5/13/2011	4:28:10 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	4:28:11 PM	Tube furnace set to 0
5/13/2011	4:29:11 PM	Helium valve closed
5/13/2011	4:29:11 PM	H2 valve closed
5/13/2011	4:29:11 PM	BCl3 valve closed
5/13/2011	4:29:11 PM	PH3 valve closed
5/13/2011	4:29:11 PM	SiCl4 pre valve closed
5/13/2011	4:29:11 PM	SiCl4 post valve closed
5/13/2011	4:29:11 PM	Bubbler valve closed
5/13/2011	4:29:11 PM	Main Vac valve opened
5/13/2011	4:29:11 PM	Bypass valve opened
5/13/2011	4:29:11 PM	Helium MFC set to  0.000000
5/13/2011	4:29:11 PM	H2 MFC set to  0.000000
5/13/2011	4:29:11 PM	BCl3 MFC set to  0.000000
5/13/2011	4:29:11 PM	PHl3 MFC set to  0.000000
5/13/2011	4:29:11 PM	SiCl4 MFC set to  0.000000
5/13/2011	4:29:11 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	4:29:11 PM	Tube furnace set to 0
5/13/2011	4:30:11 PM	H2 valve closed
5/13/2011	4:30:11 PM	BCl3 valve closed
5/13/2011	4:30:11 PM	PH3 valve closed
5/13/2011	4:30:11 PM	SiCl4 pre valve closed
5/13/2011	4:30:11 PM	SiCl4 post valve closed
5/13/2011	4:30:11 PM	Bubbler valve closed
5/13/2011	4:30:11 PM	Helium valve opened
5/13/2011	4:30:11 PM	Main Vac valve opened
5/13/2011	4:30:11 PM	Bypass valve opened
5/13/2011	4:30:11 PM	Helium MFC set to  100.000000
5/13/2011	4:30:11 PM	H2 MFC set to  0.000000
5/13/2011	4:30:11 PM	BCl3 MFC set to  0.000000
5/13/2011	4:30:11 PM	PHl3 MFC set to  0.000000
5/13/2011	4:30:11 PM	SiCl4 MFC set to  0.000000
5/13/2011	4:30:11 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	4:30:11 PM	Tube furnace set to 0
5/13/2011	4:31:11 PM	Helium valve closed
5/13/2011	4:31:11 PM	H2 valve closed
5/13/2011	4:31:11 PM	BCl3 valve closed
5/13/2011	4:31:11 PM	PH3 valve closed
5/13/2011	4:31:11 PM	SiCl4 pre valve closed
5/13/2011	4:31:11 PM	SiCl4 post valve closed
5/13/2011	4:31:11 PM	Bubbler valve closed
5/13/2011	4:31:11 PM	Main Vac valve opened
5/13/2011	4:31:11 PM	Bypass valve opened
5/13/2011	4:31:11 PM	Helium MFC set to  0.000000
5/13/2011	4:31:11 PM	H2 MFC set to  0.000000
5/13/2011	4:31:11 PM	BCl3 MFC set to  0.000000
5/13/2011	4:31:11 PM	PHl3 MFC set to  0.000000
5/13/2011	4:31:11 PM	SiCl4 MFC set to  0.000000
5/13/2011	4:31:11 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	4:31:11 PM	Tube furnace set to 0
5/13/2011	4:32:11 PM	H2 valve closed
5/13/2011	4:32:11 PM	BCl3 valve closed
5/13/2011	4:32:11 PM	PH3 valve closed
5/13/2011	4:32:11 PM	SiCl4 pre valve closed
5/13/2011	4:32:11 PM	SiCl4 post valve closed
5/13/2011	4:32:11 PM	Bubbler valve closed
5/13/2011	4:32:11 PM	Helium valve opened
5/13/2011	4:32:11 PM	Main Vac valve opened
5/13/2011	4:32:11 PM	Bypass valve opened
5/13/2011	4:32:11 PM	Helium MFC set to  100.000000
5/13/2011	4:32:11 PM	H2 MFC set to  0.000000
5/13/2011	4:32:11 PM	BCl3 MFC set to  0.000000
5/13/2011	4:32:11 PM	PHl3 MFC set to  0.000000
5/13/2011	4:32:11 PM	SiCl4 MFC set to  0.000000
5/13/2011	4:32:11 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	4:32:11 PM	Tube furnace set to 0
5/13/2011	4:32:44 PM	Run aborted at 4:32 PM
5/13/2011	4:32:44 PM	Helium valve closed
5/13/2011	4:32:44 PM	H2 valve closed
5/13/2011	4:32:44 PM	BCl3 valve closed
5/13/2011	4:32:44 PM	PH3 valve closed
5/13/2011	4:32:44 PM	SiCl4 pre valve closed
5/13/2011	4:32:44 PM	SiCl4 post valve closed
5/13/2011	4:32:44 PM	Bypass valve closed
5/13/2011	4:32:44 PM	Main Vac valve closed
5/13/2011	4:32:44 PM	Bubbler valve closed
5/13/2011	4:32:44 PM	Helium MFC set to  0.000000
5/13/2011	4:32:44 PM	H2 MFC set to  0.000000
5/13/2011	4:32:44 PM	BCl3 MFC set to  0.000000
5/13/2011	4:32:44 PM	PHl3 MFC set to  0.000000
5/13/2011	4:32:44 PM	SiCl4 MFC set to  0.000000
5/13/2011	4:32:45 PM	Tube furnace set to 0
5/13/2011	4:32:45 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
5/13/2011	4:32:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/13/2011	4:32:46 PM	Recipe started at 4:32 PM
5/13/2011	4:32:46 PM	Helium valve closed
5/13/2011	4:32:46 PM	H2 valve closed
5/13/2011	4:32:46 PM	BCl3 valve closed
5/13/2011	4:32:46 PM	PH3 valve closed
5/13/2011	4:32:46 PM	SiCl4 pre valve closed
5/13/2011	4:32:46 PM	SiCl4 post valve closed
5/13/2011	4:32:46 PM	Main Vac valve closed
5/13/2011	4:32:46 PM	Bubbler valve closed
5/13/2011	4:32:46 PM	Bypass valve opened
5/13/2011	4:32:46 PM	Helium MFC set to  0.000000
5/13/2011	4:32:46 PM	H2 MFC set to  0.000000
5/13/2011	4:32:46 PM	BCl3 MFC set to  0.000000
5/13/2011	4:32:46 PM	PHl3 MFC set to  0.000000
5/13/2011	4:32:46 PM	SiCl4 MFC set to  0.000000
5/13/2011	4:32:46 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	4:32:46 PM	Tube furnace set to 0
5/13/2011	4:32:47 PM	Helium valve closed
5/13/2011	4:32:47 PM	H2 valve closed
5/13/2011	4:32:47 PM	BCl3 valve closed
5/13/2011	4:32:47 PM	PH3 valve closed
5/13/2011	4:32:47 PM	SiCl4 pre valve closed
5/13/2011	4:32:47 PM	SiCl4 post valve closed
5/13/2011	4:32:47 PM	Bubbler valve closed
5/13/2011	4:32:47 PM	Main Vac valve opened
5/13/2011	4:32:47 PM	Bypass valve opened
5/13/2011	4:32:47 PM	Helium MFC set to  0.000000
5/13/2011	4:32:47 PM	H2 MFC set to  0.000000
5/13/2011	4:32:47 PM	BCl3 MFC set to  0.000000
5/13/2011	4:32:47 PM	PHl3 MFC set to  0.000000
5/13/2011	4:32:47 PM	SiCl4 MFC set to  0.000000
5/13/2011	4:32:47 PM	Bypass solenoid MFC set to  0.000000
5/13/2011	4:32:47 PM	Tube furnace set to 0
5/13/2011	4:32:47 PM	Run finished at 4:32 PM
5/13/2011	4:32:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
